The lab's main focused ion beam microscope (FIB) is based on a modified Micrion 9000 and 9800 system. This system has a W gas injection system (GIS), 6 axis stage, 5nm 50KV column, and electron flood gun. The system is a hybrid, with more potential ports for different future applications.
With a load lock vacuum system, the FIB allows for fast sample imaging, with the ability to mill nano-scale features and deposit materials for nano-device creation.
Explanation of images:
(left-top) Shown are an array of nano-holes milled into silicon using FIB technology, used for holding biological systems in a spectoscropy experiment.
(left-center) "This is a test." FIB milling on Au/Glass substrate.
(left-bottom) Same Substrate on optical microscope.
(right) Focused Ion Beam Microscope (FIB).